High quality edge grip end effector, aligner & flipper
Application
Highest cleanliness combined with low maintenance operation characterize our handling components for wafers. Thus, our components are successfully used in 24/7 production by a large number of wafer and chip manufacturers.
The intelligent end effector for 200 & 300mm wafers detects the position of the wafer to be picked up as it enters the cassette, greatly reducing the mechanical stress on the wafer.
In addition, wafers can be aligned and centered to an accuracy of +/-50µm using our edge grip aligner. With the flipper, semiconductor wafers can be auotmatically rotated 180° so that the top side is facing down without touching the front- or backside of the wafer.
Your advantage
25 years of experience with the fully automated transfer of wafers and the ever increasing requirements of our customers, has led us to develop our own edge grip handling products, which distanced the competition in special applications. With our own end effector, wafers can be moved as cleanly and with as little stress as with almost any other handling system.
- Edge grip components for extreme accuracy and cleanliness
- Complete in-house development & production
- Available for 200mm and also 300mm wafers
Intelligent edge grip end effector
Edge grip aligner
Edge grip flipper
Critical data of the machine at any time!
Application
Our data collection module displays the machine’s operating resources at all times. Thus, in addition to current and voltage, temperatures, flows or pressures of vacuum or compressed air can be displayed. In addition, a vibration sensor could also detect and display vibrations.
Your Advantage
Display and storage of important operating data at any time helps for predictive maintenance but also for troubleshooting. The raw data can also be transferred to a data base so trends can be created.
- Display & storage of temperatures, pressures, flows, electrical supply or vibrationibration
- Interface to export raw data for trend generation
- Lower unexpected downtime of your machine through predictive maintenance interventions
Data Colleaction Module DCM20
Piezo-driven optics for highly accurate reproducibility
Application
With our motorized beam expander, the raw laser beam can be continuously adjusted between 2x and 8x. In addition, the beam divergence and thus the focus can be defined with high precision. The piezo drives used allow the installed lenses to be moved with repeatable precision in the nanometer range.
Your Advantage
The motorized beam expander is available for 355nm, 532nm and 1,064nm wavelength.
- Stepless adjustability of the expansion from 2x to 8x
- Stepless adjustability of the focal plane +/-1mm
- Highest repeatability due to high performance piezo drives
Motorized Beam Expander
Performance Level E (PLE) certified safety modules for fiber lasers
Application
Machines that work with a fiber laser can be operated safely and reliably with our safety modules. In the event of a fault or the opening of a safety-relevant machine door, the laser is de-energized within a few milliseconds, which is why even very powerful fiber lasers can be operated safely with the module.
LEDs on the front panel indicate the current status of the module at all times. Of course, the status of the module can be transmitted to a PLC.
Your Advantage
Highest safety for your laser system is an absolute must in today’s world. With our safety modules, explicitly for machines with fiber lasers, this requirement is easy to implement. A very small standardized design with an excellent price/performance ratio characterizes these high quality safety modules.
- Suitable for fiber lasers of all wavelengths
- Easy installation and mounting on DIN rail (35mm width)
- Tested safety according to DEKRA certification (PLE)
HQ-FLCU18
HQ-FLCU18e
Performance Level e (PLe) certified shutters for all kind of laser sources
Application
With our external shutter modules, laser radiation can be reliably and safely shielded by installing the shutter directly after the laser head in the beam. All our shutter modules are controlled by a control unit type SLCU16.
Your Advantage
Our shutter modules are available with different apertures from 10 – 25 millimeters and are thus suitable for almost all laser applications from 0.1 Watt to 10 kW. Together with the shutter control unit SLCU16 our laser shutter modules also convince with the CERTIFICATION OF DEKRA with the best possible Performance Level PLe.
- Suitable for Nd:YAG, fiber & CO2 lasers of all wavelengths
- Beam diameters from 1 – 25 millimeters are no problem
- Tested quality, made in Germany
- DEKRA performance level certification
Shutter HQ-LSA10
Shutter HQ-LSA18
Shutter HQ-LSA25
